One platform for different batch processes in solar manufacturing

The RENA Technologies Batch N600 systems cover key wet-chemical process steps in industrial solar cell manufacturing. BatchTex®, BatchEtch, BatchClean N and BatchPolyClean are based on the same proven equipment platform, with each system tailored to its specific application - from texturing and etching to the cleaning of advanced solar cells.

With a throughput of up to 15,000 wafers per hour, the systems enable the cost-efficient processing of high production volumes. They are suitable for full and half wafers in formats ranging from M0 to G13. Fully automated batch processing, high equipment availability and low breakage rates provide reliable conditions for stable production with a low cost of ownership. Carriers without hold-down mechanisms and a maintenance-friendly equipment design further simplify daily operation.

BatchTex®, BatchEtch and BatchClean N feature a feed-and-bleed function. A controlled portion of the used bath solution is removed and replaced with fresh chemicals. This keeps the bath composition stable for longer, extends bath life and reduces the need for complete bath changes.

BatchTex® – alkaline texturing of mono-Si wafers

BatchTex® combines fully automated saw-damage removal with the alkaline texturing of monocrystalline silicon wafers. RENA’s monoTEX® texturing agent creates a uniformly structured surface that reduces light reflection and improves light absorption—an important basis for high-performance solar cells.

BatchEtch – alkaline and acidic etching processes for Si wafers

BatchEtch enables the fully automated processing of silicon wafers using alkaline or acidic etching processes. Depending on the application, saw damage or boron emitters can be reliably removed. Additional cleaning steps can be flexibly integrated into the process sequence.

BatchClean N – flexible cleaning of Si wafers

BatchClean N provides an automated solution for the wet-chemical cleaning of silicon wafers. Depending on the process requirements, alkaline, acidic or ozone-based cleaning methods can be used. This allows the system to be tailored to different cell technologies and production requirements.

BatchPolyClean – poly-Si etching for TOPCon cells

BatchPolyClean combines the selective removal of unwanted poly-Si layers with subsequent cleaning. The system is specifically designed for the requirements of industrial TOPCon solar cell manufacturing and supports efficient and stable process control.

Conserving resources and reducing operating costs

Wet-chemical processes in industrial solar cell manufacturing require considerable amounts of water and process chemicals. RENA Technologies’ batch systems are designed to use these resources efficiently. Optimized processes reduce water and chemical consumption while also lowering the volume of wastewater generated.

This supports more resource-efficient and environmentally responsible production while reducing equipment operating costs and overall production costs:

• Lower water consumption

• Significantly less wastewater

• Reduced use of process chemicals

• Lower operating and production costs

For more information about RENA’s batch systems and the right solution for your production process, please contact our Green Energy team.