Standard or customized for your application - high volume performance using RENA’s proven modules: RENA‘s next level batch tool platform Batch N50 lab (manual) or pilot (automatic) system has a bath capacity of 50 wafers per bath.

Batch N400 standard 400-wafers-batch-size system, with 8,000 wafers/h gross for full-size and up to 15,000 wafers/h gross for half-cut. Batch N600 high volume 600-wafers-batch-size system, with 15,000 wafers/h gross for full-size and up to 30,000 wafers/h gross for half-cut.