SINGULUS TECHNOLOGIES provides complete automated dry-in/dry-out solutions for wet-chemical treatments of Si-wafers in standard and high- efficiency solar cell lines. The recently introduced modular SILEX III batch system offers a wide range of process options. With respect to highest flexibility in configuration, the SILEX III is characterized by a clear modular design and compact footprint.

The SILEX III was specially designed for high production volumes. With this mass production system, which can achieve up to 730 MW annual capacity and more, depending on cell efficiency, all wet chemical applications (batch) at the HJT, TOPCon and PERC cell concepts can be covered. The SILEX III system achieves an output starting up to 14,000 wph (gross), depending on wafer size.