The inline evaporation tool is designed for the thermal evaporation of all perovskite-related precursor materials. It is specifically engineered for the deposition of high-quality perovskite layers, enabling the formation of optimized absorber structures for next-generation perovskite solar cells.

In addition to the evaporation system, SINGULUS offers production platforms with PVD sputtering modules for the deposition of functional layers such as electrodes, buffer layers, or barrier coatings. This combination enables a complete and flexible thin-film stack tailored to perovskite device architectures.

The system features a modular architecture, including a handling station, multiple heating and cooling zones, and dedicated deposition chambers. Leveraging proven thermal evaporation and PVD sputtering technologies, the tool ensures excellent material utilization, superior layer uniformity, and high reproducibility. Together with high uptime and mechanical yield, this results in an efficient, scalable, and future-ready production platform for perovskite solar cell manufacturing.